Titanium Forging Hloov Lub Hom Phiaj

Titanium lub hom phiaj yog cov khoom lag luam ntawm cov kev huv titanium tom qab kev ua thiab yog ua los ntawm cov yeeb yaj kiab nyias nyias los ntawm lub cev vapor deposition. Siv ua cov txheej txheem barrier rau txhuas cov xov hauv cov semiconductor chips.

1. Cov kev ua tau zoo tseem ceeb ntawm titanium phiaj

(1) Cov tsos zoo: Ua ntej tawm hauv lub Hoobkas, lub hom phiaj titanium yuav tsum tau ntxuav tsis muaj hmoov av thiab lub npoo yuav tsum huv. Tom qab ua tiav saum npoo ntawm titanium lub hom phiaj, qhov chaw roughness yuav tsum ua tau raws li cov kev xav tau ntawm cov neeg siv khoom.

(2) Sab hauv sab hauv tej yam: Yuav tsum tsis muaj tsis muaj kev suav, pores, tawg thiab lwm yam tsis xws sab hauv lub hom phiaj titanium.

(3) Muaj pes tsawg leeg: lub hom phiaj titanium tau muab faib ua cov hom phiaj titanium, thiab lwm yam. Titanium alloy boride cov phiaj xwm yog 99.9% {3}}. 999%.

(4) Cov qoob loo loj: Titanium phiaj nplej yog hnav zoo thiab zoo, thiab cov nplej nruab nrab feem ntau tau tswj tau tsawg dua 50μm.

(5) Kev ntxhib los mos: Qhov kev qhia ua keystal ntawm titanium phiaj<002>yog qhov zoo tshaj plaws, thiab ntau dua lossis sib npaug rau 35%.

(6) Geometric loj: Qhov loj ntawm titanium lub hom phiaj sib txawv raws li qhov yuav tsum siv ntawm kev siv, thiab lub cheeb tsam yog feem ntau {mm.

Titanium lub hom phiaj tuaj yeem faib ua ib lub hom phiaj titanium thiab welded titanium lub hom phiaj raws li lawv cov qauv. Lub hom phiaj titanium tsis tas yuav tsum welded, thiab kev ua hauj lwm billet yog ua ke. Welded Titanium Lub Hom Phiaj yog kom weld lub hom phiaj titanium dawb nrog lub backplane, cov vuam vuam kev suav nrog crazing thiab diffusion vuam. Viav cov ntaub ntawv txuas ntxiv suav nrog tooj liab thiab tooj liab lub zog kom tsis txhob muaj teeb meem xws li ntog thiab tawg thaum lub sijhawm sputtering. Tab sis 9-23}}} piav txog qhov kev xav tau vuam zoo rau cov hom phiaj titanium.

2. Npaj ntawm Titanium phiaj

Cov ntshiab titanium phiaj yog feem ntau npaj los ntawm cov txheej txheem xovxwm kub ntawm smelting ingot. Titanium alloy lub hom phiaj tau npaj los ntawm hmoov metallurgy.

Cov txheej txheem xovxwm kub yog raws cov kev ua kom siab huv-purity ingot tau los ntawm melting. Lub microstructure thiab cov duab thiab loj ntawm cov billet yog tswj hwm los ntawm kev zam txim, thiab lwm yam yas ua yas, thiab tom qab ntawd lub billet yog machined kom tau txais lub hom phiaj titanium. Tom qab forging, dov, thiab annealing txheej txheem, cov phiaj xwm titanium muaj cov khoom zoo thiab zoo dua li cov kev xav tau ntawm cov txheej txheem sputtering. The loss in the smelting ingot processing is large, including the loss in the melting casting process, the loss in the forging and rolling process because the oxide peel needs to be turned, and the loss in the cutting processing is also present, so the final utilization rate is about 80%.

Txog rau tib2, tii, thiab lwm cov hom phiaj alloy, nws yog ib qho yooj yim rau kev ua kom sib xyaw ua ke, thiab tom qab ntawd lub hmoov sib xyaw ua ke, thiab tom qab ntawd cov hmoov av nias lossis cov khoom siv titanium alloy tau txais. Hmoov metallurgy yog txoj kev nyiam ua rau npaj titanium alloy lub hom phiaj vim tias nws tuaj yeem siv cov nyiaj tsis muaj txiaj ntsig, thiab tuaj yeem yooj yim ntxiv cov khoom siv alloy. Cov teeb meem ntawm hmoov metallurgy yog cov kev coj dawb huv ntawm cov khoom, kev sib txawv ntawm cov muaj pes tsawg leeg, thiab qhov ceev. Cov khoom siv sab hauv thiab lwm yam ntawm kev tswj hwm yuav tsum muaj siab.

Tus txheej txheem ua hauj lwm ntawm titanium lub hom phiaj muaj feem xyuam rau kev coj ntawm lub cev thiab tshuaj lom neeg), suav nrog Magneton Sputtering, Ions Beam Sputtering, thiab lwm txoj kev. Hauv cov txheej txheem no, Titanium cov hom phiaj yog cov khoom siv tseem ceeb.

 

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